The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Mar. 26, 2004
Applicants:
Takafumi Okabe, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Inventors:
Takafumi Okabe, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06F 3/048 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of inspecting detects includes assigning a plurality of sets of image acquisition conditions, executing inspection using each of the sets of conditions, classifying all detected defects into real defects and false defects by use of an automatic defect classification function, and selecting, from the plurality of sets of conditions, a set of conditions ideal for detection.