The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Jul. 23, 2004
Applicants:
Erik Petrus Buurman, Veldhoven, NL;
Jozef Maria Finders, Veldhoven, NL;
Alexander Straaijer, Eindhoven, NL;
J. W. DE Klerk, Eindhoven, NL;
Inventors:
Erik Petrus Buurman, Veldhoven, NL;
Jozef Maria Finders, Veldhoven, NL;
Alexander Straaijer, Eindhoven, NL;
J. W. De Klerk, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); G03C 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Control of exposures is based at least in part on the relative contrast loss for a source spectrum and an pattern to be projected or an average absolute detuning of the source.