The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Mar. 28, 2005
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Markus Weiss, Aalen, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Marcel Dierichs, Venlo, NL;
Roel Moors, Helmond, NL;
Karl Heinz Schuster, Königsbronn, DE;
Axel Scholz, Aalen, DE;
Philipp Bosselmann, Schwaebisch Gmuend, DE;
Bernd Warm, Schwaig, DE;
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Markus Weiss, Aalen, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Marcel Dierichs, Venlo, NL;
Roel Moors, Helmond, NL;
Karl Heinz Schuster, Königsbronn, DE;
Axel Scholz, Aalen, DE;
Philipp Bosselmann, Schwaebisch Gmuend, DE;
Bernd Warm, Schwaig, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
ASML Netherlands, Weldhoven, NL;
Abstract
There is provided an illumination system that includes (a) a light source that emits light having a wavelength ≦193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.