The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
May. 12, 2006
Jan Evert Van Der Werf, Waalre, NL;
Mark Kroon, Utrecht, NL;
Wilhelmus Cornelis Keur, Weert, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hans Van Der Laan, Veldhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
Jan Evert Van Der Werf, Waalre, NL;
Mark Kroon, Utrecht, NL;
Wilhelmus Cornelis Keur, Weert, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hans Van Der Laan, Veldhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation sensor for use with a lithographic apparatus is disclosed, the radiation sensor comprising a radiation-sensitive material which converts incident radiation of wavelength λinto secondary radiation; and sensing means capable of detecting the secondary radiation emerging from said layer.