The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Mar. 29, 2005
Applicants:
Manish Chandhok, Beaverton, OR (US);
Wang Yueh, Portland, OR (US);
Heidi Cao, Portland, OR (US);
Inventors:
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
Abstract
A modified EUV photoresist and a method of making the resist. The modified resist includes an EUV photoresist and a LAM incorporated into the EUV photoresist.
Chandhok, Manish. (2008). Method of reducing sensitivity of euv photoresists to out-of-band radiation and euv photoresists formed according to the method (U.S. Patent No. 7459260). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7459260
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile