The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
May. 30, 2006
Ki-suk Chung, Seoul, KR;
Chung-sam Jun, Gyeonggi-do, KR;
Yu-sin Yang, Seoul, KR;
Byung-sug Lee, Gyeonggi-do, KR;
Ji-young Shin, Seoul, KR;
Tae-sung Kim, Gyeonggi-do, KR;
Ki-Suk Chung, Seoul, KR;
Chung-Sam Jun, Gyeonggi-do, KR;
Yu-Sin Yang, Seoul, KR;
Byung-Sug Lee, Gyeonggi-do, KR;
Ji-Young Shin, Seoul, KR;
Tae-Sung Kim, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A method of classifying defects of an object includes irradiating multi-wavelength light onto the object, splitting light reflected from the object into light beams, each of the light beams having different wavelengths, obtaining image information of the object based on each of the light beams, forming a characteristic matrix that represent the wavelengths and the image information, and analyzing the characteristic matrix to determine types of the defects on the object. Thus, the defects may be accurately classified using a difference between reactivity of each of the defects in accordance with variations of the wavelengths and inspection conditions.