The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Jun. 28, 2006
Nicolas Laurent, Corenc, FR;
Andrzej Buczkowski, Bend, OR (US);
Steven G. Hummel, Bend, OR (US);
Tom Walker, Portland, OR (US);
Amit Shachaf, Palo Alto, CA (US);
Nicolas Laurent, Corenc, FR;
Andrzej Buczkowski, Bend, OR (US);
Steven G. Hummel, Bend, OR (US);
Tom Walker, Portland, OR (US);
Amit Shachaf, Palo Alto, CA (US);
Nanometrics Incorporated, Milpitas, CA (US);
Abstract
A method for using photoluminescence to identify defects in a sub-surface region of a sample includes performing a first probe of the sample. A first data set, based on the first probe, is produced indicating defects located primarily in a surface layer of the sample. A second data set, based on a second probe, is produced indicating defects located in both the surface layer and a sub-surface region of the sample. The first data set is subtracted from the second data set to produce a third data set indicating defects located primarily in the sub-surface region of the sample. The first data set may optionally be normalized relative to the second data set before performing the subtraction. The first and second probes may advantageously be performed using a first laser and a second laser, respectively, having different wavelengths from each other.