The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Sep. 22, 2004
Arno Jan Bleeker, Westerhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Peter C. Kochersperger, Easton, CT (US);
Kars Zeger Troost, Waalre, NL;
Arno Jan Bleeker, Westerhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Peter C. Kochersperger, Easton, CT (US);
Kars Zeger Troost, Waalre, NL;
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
One or more patterning arrays are mounted to a mounting plate via height adjustment structures that enable the flatness of the active surfaces of the patterning arrays to be controlled. The height adjustment structures may comprise an array of piezoelectric actuators or screws. Alternatively, the backside of the patterning means may be polished to optical flatness and bonded by crystal bonding to an optically flat surface of a rigid mounting body.