The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Jul. 01, 2003
Hiroshi Shinriki, Nirasaki, JP;
Kazuya Dobashi, Nirasaki, JP;
Mikio Suzuki, Nirasaki, JP;
Takashi Magara, Nirasaki, JP;
Hiroshi Shinriki, Nirasaki, JP;
Kazuya Dobashi, Nirasaki, JP;
Mikio Suzuki, Nirasaki, JP;
Takashi Magara, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a cleaning step of a substrate-processing device, vacuum drawing is made for the space between an inner chamber and an outer chamber that receives the inner chamber. Temperature of the inner chamber is set higher than the temperature of the inner chamber during substrate processing and set lower than the temperature of a substrate support member. After that, a cleaning gas containing hexafluoroacetylaceton (Hhfac) is supplied in the inner chamber, and substances to be cleaned off adhering inside the inner chamber are removed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile