The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Nov. 14, 2005
Jiun-heng Wang, Tainan, TW;
Yeong-ching Chao, Tainan, TW;
An-hong Liu, Tainan, TW;
ChipMOS Technologies (Bermuda) Ltd., Hamilton, BM;
ChipMOS Technologies Inc., Hsinchu, TW;
Abstract
A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After photolithography processing, a plurality of plugs are formed from the photo resist. A titanium layer is sputtered on the release layer and on the plurality of plugs. The plugs are removed so that the titanium layer has a plurality of openings. An injector plate fabricated from this method has the characteristics of biocompatibility with a plurality of fine-pitch openings with uniform diameters.