The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Dec. 09, 2004
Johannes Hubertus Josephina Moors, Helmond, NL;
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Gert-jan Heerens, Schoonhoven, NL;
Frederik Theodorus Elisabeth Heuts, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Hendrik Antony Johannes Neerhof, Eindhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Frederik Theodorus Elisabeth Heuts, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Hendrik Antony Johannes Neerhof, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device manufacturing method includes projecting a patterned beam of radiation through an optics compartment and a channel that provides an open connection between the optics compartment and a substrate compartment onto a substrate, maintaining an ionized flush gas at a higher pressure in the channel than in the substrate compartment and in the optics compartment during the projecting, intercepting particles that emanate from the substrate with the ionized flush gas, pumping the flush gas carrying the intercepted particles from the substrate compartment using a pump coupled to a gas outlet coupled to at least one of the compartments, and establishing an electrical potential difference between a wall of the channel and the outlet and/or a rotor of the pump so that the outlet and/or the rotor of the pump attracts positively charged ions that stem from the flush gas in the channel.