The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
Dec. 07, 2005
Tetsujiro Kono, Komaki, JP;
Hiroki Doi, Komaki, JP;
Minoru Ito, Komaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Keiki Ito, Nirasaki, JP;
Hiroki Endo, Nirasaki, JP;
Tsuyoshi Shimazu, Nirasaki, JP;
Jun Hirose, Nirasaki, JP;
Osamu Katsumata, Nirasaki, JP;
Kazuyuki Miura, Nirasaki, JP;
Takashi Kitazawa, Nirasaki, JP;
Tetsujiro Kono, Komaki, JP;
Hiroki Doi, Komaki, JP;
Minoru Ito, Komaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Keiki Ito, Nirasaki, JP;
Hiroki Endo, Nirasaki, JP;
Tsuyoshi Shimazu, Nirasaki, JP;
Jun Hirose, Nirasaki, JP;
Osamu Katsumata, Nirasaki, JP;
Kazuyuki Miura, Nirasaki, JP;
Takashi Kitazawa, Nirasaki, JP;
CKD Corporation, Komaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.