The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2007
Filed:
Nov. 02, 2006
Liang-yuh Chen, Foster City, CA (US);
Yuchun Wang, San Jose, CA (US);
Yan Wang, Sunnyvale, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Daniel A. Carl, Pleasanton, CA (US);
Ralph Wadensweiler, Sunnyvale, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Paul D. Butterfield, San Jose, CA (US);
Rashid Mavliev, Santa Clara, CA (US);
Stan D. Tsai, Fremont, CA (US);
Liang-Yuh Chen, Foster City, CA (US);
Yuchun Wang, San Jose, CA (US);
Yan Wang, Sunnyvale, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Daniel A. Carl, Pleasanton, CA (US);
Ralph Wadensweiler, Sunnyvale, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Paul D. Butterfield, San Jose, CA (US);
Rashid Mavliev, Santa Clara, CA (US);
Stan D. Tsai, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate. A plurality of perforations may be formed in the polishing article for flow of material therethrough. An electrode is also exposed to the polishing surface by at least a portion of the plurality of perforations. The article of manufacture may also include a polishing surface having a plurality of grooves, wherein a portion of the plurality of grooves intersect with a portion of the plurality of perforations.