The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Jan. 31, 2004
Marco Tortonese, Mountain View, CA (US);
Jerry Prochazka, Clayton, CA (US);
Ellen Laird, San Jose, CA (US);
Pat Brady, Livermore, CA (US);
Rene M. Blanquies, San Jose, CA (US);
Marco Tortonese, Mountain View, CA (US);
Jerry Prochazka, Clayton, CA (US);
Ellen Laird, San Jose, CA (US);
Pat Brady, Livermore, CA (US);
Rene M. Blanquies, San Jose, CA (US);
KLA Tencor, Inc., San Jose, CA (US);
Abstract
A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.