The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Feb. 12, 2004
Satoshi Harada, Nirasaki, JP;
Edward C. Hume, Iii, Austin, TX (US);
James E Willis, Austin, TX (US);
Kevin Andrew Chamness, Austin, TX (US);
Hieu a Lam, Richardson, TX (US);
Hongyu Yue, Plano, TX (US);
David Fatke, Austin, TX (US);
Satoshi Harada, Nirasaki, JP;
Edward C. Hume, III, Austin, TX (US);
James E Willis, Austin, TX (US);
Kevin Andrew Chamness, Austin, TX (US);
Hieu A Lam, Richardson, TX (US);
Hongyu Yue, Plano, TX (US);
David Fatke, Austin, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.