The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Sep. 27, 2002
Dennis J. Ciplickas, San Jose, CA (US);
Markus Decker, Munich, DE;
Christopher Hess, San Ramon, CA (US);
Brian E. Stine, Santa Clara, CA (US);
Larg H. Weiland, San Ramon, CA (US);
Dennis J. Ciplickas, San Jose, CA (US);
Markus Decker, Munich, DE;
Christopher Hess, San Ramon, CA (US);
Brian E. Stine, Santa Clara, CA (US);
Larg H. Weiland, San Ramon, CA (US);
PDF Solutions, Inc., San Jose, CA (US);
Abstract
A test structure combines a first structure () for erosion evaluation with a second structure () for extraction of defect size distributions. The first structure () is a loop structure usable determine a resistance value that varies with metal height. The second structure is a NEST structure (). Loop lines of the loop structure () are connected on both sides of the NEST structure ().