The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Mar. 28, 2003
Jaime Poris, Boulder Creek, CA (US);
Claudio L. Rampoldi, Mountain View, CA (US);
Pablo I. Rovira, San Francisco, CA (US);
Christopher W. Blaufus, San Jose, CA (US);
Jaime Poris, Boulder Creek, CA (US);
Claudio L. Rampoldi, Mountain View, CA (US);
Pablo I. Rovira, San Francisco, CA (US);
Christopher W. Blaufus, San Jose, CA (US);
Nanometrics Incorporated, Milpitas, CA (US);
Abstract
A metrology instrument includes an eddy current sensor that is mounted to and concentric with a confocal distance sensor. By measuring the precise vertical placement of the eddy current probe with respect to the surface of the sample using the confocal distance sensor, the accuracy and precision of the eddy current measurement is improved. Because the confocal distance sensor and the eddy current sensor are confocal, there is no need to move the relative lateral positions between the sample and instrument, between the distance measurement and the eddy current measurement, thereby reducing error in the measurement as well are maximizing the throughput by minimizing the required stage travel for a single measurement.