The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Jun. 07, 2004
Ilyoung Richard Hong, San Jose, CA (US);
James Tsung, San Jose, CA (US);
Daniel Clarence Lubben, San Jose, CA (US);
Peijun Ding, San Jose, CA (US);
Nirmalya Maity, Los Altos, CA (US);
Ilyoung Richard Hong, San Jose, CA (US);
James Tsung, San Jose, CA (US);
Daniel Clarence Lubben, San Jose, CA (US);
Peijun Ding, San Jose, CA (US);
Nirmalya Maity, Los Altos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A small magnet assembly is scanned in a retrograde planetary or epicyclic path about the back of a target being plasma sputtered including an orbital rotation about the center axis of the target and a planetary rotation about another axis rotating about the target center axis. The magnet assembly passes through the target center, thus allowing full target coverage. A properly chosen ratio of the two rotations about respective axes produces a much slower magnet velocity near the target periphery than at the target center. A geared planetary mechanism includes a rotating drive plate, a fixed center gear, and an idler and a follower gear rotatably supported in the drive plane supporting a cantilevered magnet assembly on the side of the drive plate facing the target. A belted planetary mechanism includes a fixed center capstan, a follower pulley supporting the magnet assembly, and a belt wrapped around them.