The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Jun. 24, 2004
Mu-tsang Lin, Changhua, TW;
Tien-wen Wang, Hsinchu, TW;
Joseph W. L. Fang, Hsinchu, TW;
Ie-fun Lai, Yonghe, TW;
Chon-hwa Chu, Taoyuan Hsien, TW;
Jian-hong Chen, Hsinchu, TW;
Chin-chih Chen, Hsinchu, TW;
Yu-yi Wu, Yongkang, TW;
Yao-wen Wu, Tainan, TW;
Wen-sheng Chien, Miaoli Hsien, TW;
Mu-Tsang Lin, Changhua, TW;
Tien-Wen Wang, Hsinchu, TW;
Joseph W. L. Fang, Hsinchu, TW;
Ie-Fun Lai, Yonghe, TW;
Chon-Hwa Chu, Taoyuan Hsien, TW;
Jian-Hong Chen, Hsinchu, TW;
Chin-Chih Chen, Hsinchu, TW;
Yu-Yi Wu, Yongkang, TW;
Yao-Wen Wu, Tainan, TW;
Wen-Sheng Chien, Miaoli Hsien, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Abstract
A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.