The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Sep. 13, 1999
Markku Leskelä, Espoo, FI;
Mikko Ritala, Espoo, FI;
Timo Hatanpää, Espoo, FI;
Timo Hänninen, Helsinki, FI;
Marko Vehkamäki, Helsinki, FI;
Markku Leskelä, Espoo, FI;
Mikko Ritala, Espoo, FI;
Timo Hatanpää, Espoo, FI;
Timo Hänninen, Helsinki, FI;
Marko Vehkamäki, Helsinki, FI;
ASM International N.V., Bilthoven, NL;
Abstract
The present invention relates to a method for growing oxide thin films which contain barium and/or strontium. According to the method, such thin films are made by the ALE technique by using as precursors for barium and strontium their cyclopentadienyl compounds. A thin film made by means of the invention has a high permittivity and excellent conformality.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile