The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Oct. 18, 2002
Santiago Del Puerto, Milton, NY (US);
Daniel N. Galburt, Wilton, CT (US);
Andrew W. Mccullough, Newtown, CT (US);
Stephen Roux, New Fairfield, CT (US);
Joost Jeroen Ottens, Veldhoven, NL;
Santiago del Puerto, Milton, NY (US);
Daniel N. Galburt, Wilton, CT (US);
Andrew W. McCullough, Newtown, CT (US);
Stephen Roux, New Fairfield, CT (US);
Joost Jeroen Ottens, Veldhoven, NL;
ASML Holding N.V., Veldhoven, NL;
Abstract
Systems and methods eliminate vibrations produced by coolant fluid flowing through a short stroke stage and prevent change in thermally-induced distortion of the short stroke stage by maintaining the temperature and temperature distribution within the short stroke stage constant regardless of actinic heat load incident on a reticle. This is done by: (1) conducting heat through the reticle and short stroke stage components, (2) radiatively transferring heat from the short stroke stage to a long stroke stage, and (3) using convection and a cooling system to dissipate heat from the long stroke stage. The short stroke stage can be magnetically levitated from the long stroke stage. This way there is no physical contact, but the long stroke stage's movements can still control the short stroke stage's movements. By not physically contacting the long stroke stage, the short stroke stage is not affected by vibrations in the long stroke stage caused by the flowing coolant.