The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Feb. 20, 2004
Alan E. Rosenbluth, Yorktown Heights, NY (US);
Gregg M. Gallatin, Newtown, CT (US);
Ronald L. Gordon, Poughkeepsie, NY (US);
Nakgeuon Seong, Wappingers Falls, NY (US);
Alexey Y. Lvov, Tarrytown, NY (US);
William D. Hinsberg, Fremont, CA (US);
John A. Hoffnagle, San Jose, CA (US);
Frances A. Houle, Fremont, CA (US);
Martha I. Sanchez, Menlo Park, CA (US);
Alan E. Rosenbluth, Yorktown Heights, NY (US);
Gregg M. Gallatin, Newtown, CT (US);
Ronald L. Gordon, Poughkeepsie, NY (US);
Nakgeuon Seong, Wappingers Falls, NY (US);
Alexey Y. Lvov, Tarrytown, NY (US);
William D. Hinsberg, Fremont, CA (US);
John A. Hoffnagle, San Jose, CA (US);
Frances A. Houle, Fremont, CA (US);
Martha I. Sanchez, Menlo Park, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and system is provided for computing lithographic images that may take into account non-scalar effects such as lens birefringence, resist stack effects, tailored source polarizations, and blur effects of the mask and the resist. A generalized bilinear kernel is formed, which is independent of the mask transmission function, and which may then be treated using a decomposition to allow rapid computation of an image that includes such non-scalar effects. Weighted pre-images may be formed from a coherent sum of pre-computed convolutions of the dominant eigenfunctions of the generalized bilinear kernel with the appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can then be used to perform model-based optical proximity correction (MBOPC).