The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Feb. 22, 2002
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Munenori Fukunishi, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mitsunobu Isobe, Machida, JP;
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Munenori Fukunishi, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mitsunobu Isobe, Machida, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Conventionally, defect data outputted by an inspection system comprised only characteristic quantitative data, such as coordinate data, area, and projected length, and only the coordinate data for moving to a defect location could be utilized effectively. By contrast, by using image data in addition to characteristic quantitative data as the defect data for an inspection system, the retrieval of image data via an outside results confirmation system is made possible. Further, for defect data of a plurality of substrates, it is possible to display a defect image during inspection by the fact that similar defects are retrieved via images and retrieval results are displayed as trends, which makes it possible to display a defect image during inspection by searching similar defects on images and displaying them as a trend, and designating a substrate on the trend, thereby displaying the defect map thereof and designating a defect on the defect map.