Machida, Japan

Mitsunobu Isobe


Average Co-Inventor Count = 5.7

ph-index = 6

Forward Citations = 112(Granted Patents)


Company Filing History:


Years Active: 1981-2007

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9 patents (USPTO):Explore Patents

Title: Mitsunobu Isobe: Innovator in Pattern Inspection Technology

Introduction

Mitsunobu Isobe is a prominent inventor based in Machida, Japan. He has made significant contributions to the field of pattern inspection technology, holding a total of 9 patents. His work focuses on improving the accuracy and efficiency of defect detection in various inspection systems.

Latest Patents

One of Isobe's latest patents is a method and apparatus for inspecting a pattern. This innovative approach addresses the challenges of comparing images obtained from different stage scans, which can lead to performance deterioration in detecting error defects. By utilizing high sensitivity conditions to identify defect candidates, Isobe's method establishes a critical threshold value for defect detection. This allows for multiple inspection results to be obtained in a single inspection, enhancing the overall effectiveness of the inspection process.

Another notable patent is an apparatus for inspecting a specimen. Traditionally, defect data outputted by inspection systems consisted only of quantitative data, limiting their effectiveness. Isobe's invention incorporates image data alongside characteristic quantitative data, enabling the retrieval of image data through an external results confirmation system. This advancement allows for the display of defect images during inspections, facilitating the identification of similar defects and improving the inspection process.

Career Highlights

Mitsunobu Isobe has built a successful career at Hitachi, Ltd., where he has been instrumental in developing advanced inspection technologies. His innovative solutions have significantly impacted the industry, leading to improved defect detection and analysis.

Collaborations

Isobe has collaborated with notable colleagues, including Takashi Hiroi and Kenzo Takeichi. Their combined expertise has contributed to the advancement of inspection technologies and the successful implementation of Isobe's innovative methods.

Conclusion

Mitsunobu Isobe's contributions to pattern inspection technology have established him as a leading inventor in his field. His innovative patents and collaborative efforts continue to drive advancements in defect detection and inspection systems.

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