The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Dec. 31, 2003
Cornelis Petrus Andreas Marie Luijkx, Best, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hako Botma, Eindhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Heine Melle Mulder, Eindhoven, NL;
Johannes Hendrik Everhardus Aldegonda Muijderman, Veldhoven, NL;
Cornelis Jacobus Van Duijn, Best, NL;
Jan Jaap Krikke, Best, NL;
Cornelis Petrus Andreas Marie Luijkx, Best, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Hako Botma, Eindhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Heine Melle Mulder, Eindhoven, NL;
Johannes Hendrik Everhardus Aldegonda Muijderman, Veldhoven, NL;
Cornelis Jacobus Van Duijn, Best, NL;
Jan Jaap Krikke, Best, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An optical attenuator device operates to remove a part of a beam of radiation having a higher than average intensity using at least one optical attenuator element. The device has application in a radiation system, and/or a lithographic apparatus, in particular a scanning lithographic apparatus, wherein the optical attenuator element(s) are provided in a central part of the beam, for example perpendicularly to a scanning direction.