The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Jan. 07, 2003
Applicants:
Tian-an Chen, Phoenix, AZ (US);
Robert Meagley, Beaverton, OR (US);
Kevin P. O'brien, Portland, OR (US);
Michael D. Goodner, Hillsboro, OR (US);
James Powers, Aloha, OR (US);
Inventors:
Tian-An Chen, Phoenix, AZ (US);
Robert Meagley, Beaverton, OR (US);
Kevin P. O'Brien, Portland, OR (US);
Michael D. Goodner, Hillsboro, OR (US);
James Powers, Aloha, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/38 (2006.01); C23C 16/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
Carborane may be used as a precursor to form low dielectric constant dielectrics. The carborane material may be modified to enable it to be deposited by chemical vapor deposition.