The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Jul. 29, 2004
Johannes Christiaan Van 't Spijker, Delft, NL;
Marco Jan-jaco Wieland, Delft, NL;
Ernst Habekotte, Delft, NL;
Floris Pepijn Van Der Wilt, Delft, NL;
Johannes Christiaan van 't Spijker, Delft, NL;
Marco Jan-Jaco Wieland, Delft, NL;
Ernst Habekotte, Delft, NL;
Floris Pepijn van der Wilt, Delft, NL;
Mapper Lithography IP B.V., CJ Delft, NL;
Abstract
The invention relates to a modulator for modulating the magnitude of a beamlet in a multi-beamlet lithography system, said modulator comprising at least one means for influencing the direction of a beamlet, a light sensitive element for receiving light from a modulated light beam and converting said light into a signal, and discretizing means, coupling to said light sensitive element and to at least one of means for influencing, for converting said signal received from said light sensitive element into a discrete signal having discrete values selected from a set of predefined discrete values and providing said discrete signal to said means for influencing.