The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2005
Filed:
Aug. 10, 1999
Norio Maeda, Yamatokouriyama, JP;
Koji Sumi, Yamatokouriyama, JP;
Hiroshi Aihara, Sakai, JP;
Masao Oono, Sakai, JP;
Naoaki Izu Tani, Sakai, JP;
Norio Maeda, Yamatokouriyama, JP;
Koji Sumi, Yamatokouriyama, JP;
Hiroshi Aihara, Sakai, JP;
Masao Oono, Sakai, JP;
Naoaki Izu Tani, Sakai, JP;
Toho Kasei Ltd., Yamatokouriyama, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
A device for drying substrates which stores a plurality of substrate () and which comprises a processing container () to which cleaning fluid () after cleaning the substrates () is drained and an injection nozzle () for injecting drying fluid located at the terminating part of a feed pipe () through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.