The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Aug. 03, 2004
Masato Muraki, Tokyo, JP;
Yoshinori Nakayama, Sayama, JP;
Hiroya Ohta, Kodaira, JP;
Haruo Yoda, Hinode, JP;
Norio Saitou, Tokorozawa, JP;
Masato Muraki, Tokyo, JP;
Yoshinori Nakayama, Sayama, JP;
Hiroya Ohta, Kodaira, JP;
Haruo Yoda, Hinode, JP;
Norio Saitou, Tokorozawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged particle beam exposure apparatus which exposes a substrate using a plurality of charged particle beams includes a first measurement member for making the plurality of charged particle beams come incident and measuring a total current value of the charged particle beams. A second measurement member makes the plurality of charged particle beams come incident and multiplies electrons of each of the incident charged particle beams, thereby measuring a relative value of a current of each of the charged particle beams.