The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Aug. 09, 2002
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Wilhelm Egle, Aalen, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Wilhelm Egle, Aalen, DE;
Vadim Yevgenyevich Banine, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
Carl Zeiss SMT AG, Oberkochen, DE;
ASML Lithography B.V., Veldhoven, NL;
Abstract
There is provided an illumination system for wavelengths of ≦193 nm. The illumination system includes an object plane, a plane conjugated to the object plane, a first collector between the object plane and the conjugated plane, and a second collector after the conjugated plane. The first collector focuses a beam bundle of rays from the object plane in the conjugated plane. At least one of the first and second collectors includes a mirror shell. The rays strike the mirror shell at an angle of incidence of less than 20° relative to a surface tangent of the mirror shell.