The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Feb. 28, 2003
Haoren Zhuang, Tokyo, JP;
Ulrich Egger, Kanagawa, JP;
Jingyu Lian, Tokyo, JP;
Gerhard Beitel, Kanagawa, JP;
Karl Hornik, Kanagawa, JP;
Haoren Zhuang, Tokyo, JP;
Ulrich Egger, Kanagawa, JP;
Jingyu Lian, Tokyo, JP;
Gerhard Beitel, Kanagawa, JP;
Karl Hornik, Kanagawa, JP;
Infineon Technologies Aktiengesellschaft, Munich, DE;
Abstract
A capacitor structure having a capacitor with a top electrode, a bottom electrode, and a capacitor dielectric layer between the top and bottom electrodes is disclosed. The capacitor includes upper and lower portions. The demarcation between the upper and lower portion is located between top and bottom surfaces of the capacitor dielectric layer. A dielectric layer is provided on the sidewalls of the upper portion of the capacitor to prevent shorting between the electrodes that can be caused by a conductive fence formed during processing.