The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
May. 24, 2004
Maki Tanaka, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Takashi Hiroi, Yokohama, JP;
Hiroyuki Shinada, Chofu, JP;
Taku Ninomiya, Hitachinaka, JP;
Maki Tanaka, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Takashi Hiroi, Yokohama, JP;
Hiroyuki Shinada, Chofu, JP;
Taku Ninomiya, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A convergent charged particle beam apparatus includes an electron beam system which emits a converged electron beam, a vacuum chamber which is connected to the electron beam system, and a stage which mounts a specimen and moves at least in one direction inside of the vacuum chamber. An electron beam image observation unit observes an electron beam image of a surface of the specimen. A height detector optically detects a height of the specimen mounted on the stage by illuminating the surface of said specimen with light and by detecting reflected light of the illumination reflected from the surface of the specimen, and a controller controls a focus position of the electron beam in accordance with an output from the height detector while the stage is moving at least in one direction.