The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
May. 01, 2003
Applicant:
Inventors:
Maki Tanaka, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Takashi Hiroi, Yokohama, JP;
Hiroyuki Shinada, Chofu, JP;
Taku Ninomiya, Hitachinaka, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/7244 ; H01J 3/728 ;
U.S. Cl.
CPC ...
H01J 3/7244 ; H01J 3/728 ;
Abstract
A convergent charged particle beam apparatus and method of detecting an electron beam image of a specimen in which a converged electron beam is irradiated and scanned over a surface of a specimen which is mounted on a movable stage and moves at least in one direction. An electron beam image of the surface of the specimen mounted on the stage is observed and a height of the specimen mounted on the stage is detected. A focus position of the electron beam is controlled in accordance with the height detected.