The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2004

Filed:

May. 22, 2001
Applicant:
Inventors:

Yan Man Tsui, Union City, CA (US);

Fwu-Iuan Hshieh, Saratoga, CA (US);

Koon Chong So, Fremont, CA (US);

Assignee:

General Semiconductor, Inc., Melville, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/7095 ; H01L 2/947 ; H01L 2/9812 ; H01L 3/107 ; H01L 2/128 ;
U.S. Cl.
CPC ...
H01L 2/7095 ; H01L 2/947 ; H01L 2/9812 ; H01L 3/107 ; H01L 2/128 ;
Abstract

A Schottky rectifier includes a semiconductor structure having first and second opposing faces each extending to define an active semiconductor region and a termination semiconductor region. The semiconductor structure includes a cathode region of the first conductivity type adjacent the first face and a drift region of the first conductivity type adjacent the second face. The drift region has a lower net doping concentration than that of the cathode region. A plurality of trenches extends from the second face into the semiconductor structure and defines a plurality of mesas within the semiconductor structure. At least one of the trenches is located in each of the active and the termination semiconductor regions. A first insulating region is located adjacent the semiconductor structure in the plurality of trenches. A second insulating region electrically isolates the active semiconductor region from the termination semiconductor region. An anode electrode is (a) adjacent to and forms a Schottky rectifying contact with the semiconductor structure at the second face and is (b) adjacent to the first insulating region in the trenches. The anode electrode electrically connects together the plurality of trenches.


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