The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
Mar. 31, 2000
James W. Adkisson, Jericho, VT (US);
Arne W. Ballantine, Cold Spring, NY (US);
Matthew D. Gallagher, Burlington, VT (US);
Peter J. Geiss, Underhill, VT (US);
Jeffrey D. Gilbert, Burlington, VT (US);
Shwu-Jen Jeng, Wappingers Falls, NY (US);
Donna K. Johnson, Underhill, VT (US);
Robb A. Johnson, South Burlington, VT (US);
Glen L. Miles, Essex Junction, VT (US);
Kirk D. Peterson, Essex Junction, VT (US);
James J. Toomey, Poughkeepsie, NY (US);
Tina Wagner, Newburgh, NY (US);
International Business Machines Corp., Armonk, NY (US);
Abstract
A process of forming a nitride film on a semiconductor substrate including exposing a surface of the substrate to a rapid thermal process to form the nitride film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile