The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Jul. 11, 2001
Norikatsu Sato, Kikuchi-Gun, JP;
Kunie Ogata, Kikuchi-Gun, JP;
Yoshio Kimura, Kikuchi-Gun, JP;
Hiroshi Tomita, Kikuchi-Gun, JP;
Seiji Nakashima, Kikuchi-Gun, JP;
Hidehiko Kamiya, Kikuchi-Gun, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A cassette station, a processing station having a coating unit and a developing unit, and an inspecting station having a film thickness inspecting apparatus and a defect inspecting apparatus are disposed in the direction approximately perpendicular to the direction of the disposition of cassettes of the cassette station in such a manner that the inspecting station is disposed midway between the cassette station and the processing station. In the structure, the inspecting station and the processing station are connected and wafers are automatically transferred among the stations, operations from the substrate process to the inspection can be simplified and the time period necessary therefore can be shortened.