The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Jun. 16, 2000
Applicant:
Inventors:
Junichiro Yoshioka, Tokyo, JP;
Satoshi Sendai, Tokyo, JP;
Atsushi Chono, Tokyo, JP;
Mitsuo Tada, Tokyo, JP;
Akihisa Hongo, Tokyo, JP;
Yoshitaka Mukaiyama, Tokyo, JP;
Kenya Tomioka, Tokyo, JP;
Akira Ogata, Tokyo, JP;
Kenichi Suzuki, Tokyo, JP;
Naomitsu Ozawa, Kanagawa, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25B 9/04 ; C25D 2/112 ;
U.S. Cl.
CPC ...
C25B 9/04 ; C25D 2/112 ;
Abstract
The present invention provides a conductivity sensing device capable of detecting the conductivity (contact state) of the plurality of feeder contacts contacting the conductive area of the substrate, and a plating apparatus capable of forming a plating film of uniform thickness by supplying a uniform plating current through a plurality of feeder contacts.