The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Aug. 13, 1998
Applicant:
Inventors:
Glenn W Gale, Austin, TX (US);
Rangarajan Jagannathan, Essex Junction, VT (US);
Karen P Madden, Poughquag, NY (US);
Kenneth J McCullough, Fishkill, NY (US);
Harald F Okorn-Schmidt, Putnam Valley, NY (US);
Keith R Pope, Danbury, CT (US);
David L Rath, Stormville, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438756 ;
Abstract
Silicon oxide is removed from an article employing a liquid composition containing a fluoride-containing compound, organic solvent, and water. The methods of the invention are especially useful for removal of silicon oxide formed by thermal oxidation of a silicon substrate.