The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Jan. 23, 1997
Hidetami Yaegashi, Kokubunji, JP;
Takayuki Toshima, Yamanashi-ken, JP;
Masami Akimoto, Kumamoto, JP;
Eiji Yamaguchi, Yamanashi-ken, JP;
Junichi Kitano, Kofu, JP;
Takayuki Katano, Nirasaki, JP;
Hiroshi Shinya, Kofu, JP;
Naruaki Iida, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing apparatus comprises a plurality of process unit groups each including a plurality of process units for subjecting an object to a series of processes, the process units being arranged vertically in multiple stages, an object transfer space being defined among the process unit groups, and a transfer mechanism for transferring the object, the transfer mechanism having a transfer member vertically movable in the object transfer space, the transfer member being capable of transferring the object to each of the process units. The processing apparatus further comprises a mechanism for forming a downward air flow in the object transfer space, a mechanism for controlling the quantity of the downward air flow, and a mechanism for controlling the pressure in the object transfer space. Thus, a variation in condition of the object transfer space is reduced.