The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1998
Filed:
Sep. 24, 1996
Applicant:
Inventors:
Mitsuru Sato, Yokohama, JP;
Kazuyuki Nitta, Koza-gun, JP;
Hideo Hada, Hiratsuka, JP;
Tatsuya Hashiguchi, Chigasaki, JP;
Hiroshi Komano, Koza-gun, JP;
Toshimasa Nakayama, Chigasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
4302811 ; 4302701 ; 430919 ; 430921 ; 522 57 ;
Abstract
Disclosed is a novel and improved photoresist composition which comprises: (A) a film-forming resinous compound which is, in the presence of an acid, subject to a change in the solubility in an alkaline solution; and (B) an acid-generating agent capable of releasing an acid by the exposure to actinic rays which is an oxime sulfonate compound represented by the general formula