The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 1996
Filed:
Mar. 09, 1994
Michinobu Mizumura, Yokohama, JP;
Yuuichi Hamamura, Yokohama, JP;
Junzou Azuma, Yokohama, JP;
Akira Shimase, Yokosuka, JP;
Takashi Kamimura, Yokosuka, JP;
Fumikazu Itoh, Fujisawa, JP;
Kaoru Umemura, Musashino, JP;
Yoshimi Kawanami, Kokubunji, JP;
Yuuichi Madokoro, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A processing method and a processing apparatus realizing the method use a focused ion beam generator. The apparatus includes a plasma or liquid metal ion source producing ions not influencing electric characteristics of a sample, an ion beam generator for extracting ions from the ion source into an ion beam, an ion beam focusing device for focusing the ion beam, an irradiator for irradiating the focused ion beam onto the sample, and a sample chamber in which the sample to be irradiated for processing is installed. The focused ion beam is irradiated onto a sample such as a silicon wafer or device to conduct on a particular position of the sample a fine machining work, a fine layer accumulation, and an analysis.