The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 1995
Filed:
Aug. 31, 1993
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Yamanashi Limited, Nirasaki, JP;
Abstract
A probe apparatus tests the electrical characteristics of chips formed on a semiconductor wafer by bringing probes into contact with pads of each chip. The probes, which include ones for power supply potentials, signals, and ground potential, are mounted vertically penetrating a ring block which is attached to the center of a main PCB of a probe card. A tray containing a number of fuses is mounted over the probe card by means of struts. The fuses in the tray connect wires of the main PCB, to which the supply potential of a DC power source is applied, and their corresponding probes. The fuses and the tray can be collectively removed from the probe card to be replaced with new ones.