The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
May. 13, 2022
Intel Corporation, Santa Clara, CA (US);
Clifford J. Engel, Hillsboro, OR (US);
Robert L. Bristol, Portland, OR (US);
Richard H. Livengood, San Jose, CA (US);
Mahesh Tanniru, Portland, OR (US);
Akshit Peer, Hillsboro, OR (US);
Mauro J. Kobrinsky, Portland, OR (US);
Kevin Lai Lin, Beaverton, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Lithographic methodologies involving, and apparatuses suitable for, inline circuit edits are described. In an example, an integrated circuit structure includes a first conductive line and a second conductive line in a first dielectric layer, the second conductive line laterally spaced apart from the first conductive line. The integrated circuit structure also includes a first conductive via and a second conductive via in a second dielectric layer, the second dielectric layer over the first dielectric layer, the second conductive via laterally spaced apart from the first conductive via, the first conductive via vertically over and connected to the first conductive line, and the second conductive via vertically over but separated from the second conductive line.
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