Photoactive compounds, photoresist compositions including the same, and pattern formation methods

Abstract

A photoactive compound including an organic cation; and an anion represented by Formula (1): wherein X is an organic group; Yand Yare each independently a non-hydrogen substituent; Yand Ytogether optionally form a ring; Zis hydrogen, halogen, substituted or unsubstituted Calkyl, substituted or unsubstituted Ccycloalkyl, substituted or unsubstituted Cheterocycloalkyl, substituted or unsubstituted Caryl, substituted or unsubstituted Carylalkyl, substituted or unsubstituted Calkylaryl, substituted or unsubstituted Caryloxy, substituted or unsubstituted Cheteroaryl, substituted or unsubstituted Calkylheteroaryl, substituted or unsubstituted Cheteroarylalkyl, or substituted or unsubstituted Cheteroaryloxy; Zoptionally further comprises one or more divalent linking groups as part of its structure; Zand one of Yor Ytogether optionally form a ring; X and Ztogether optionally form a ring; and X and one of Yor Ytogether optionally form a ring.