Pulsed voltage waveform with binary pulses for biasing of plasma

Abstract

Methods and apparatus for forming a discrete multimodal ion energy distribution function (IEDF)-containing plasma. One example method generally includes generating a first burst of a first plurality of pulses by delivering, in a first pulsing state, a first pulse of the first plurality of pulses within a first burst of pulses, and delivering, in the first pulsing state, a second pulse of the first plurality of pulses within the first burst of pulses. The example method also generally incudes generating a second burst of a second plurality of pulses by delivering, in a second pulsing state, a third pulse of the second plurality of pulses within a second burst of pulses, and delivering, in the second pulsing state, a fourth pulse of the second plurality of pulses within the second burst of pulses, where the first voltage, the second voltage, the third voltage, and the fourth voltage are each different.