The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Dec. 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Shih-Cheng Chen, New Taipei City, TW;
Wen-Ting Lan, Hsinchu City, TW;
Jung-Hung Chang, Changhua County, TW;
Tsung-Han Chuang, Tainan City, TW;
Chia-Cheng Tsai, Hsinchu, TW;
Kuo-Cheng Chiang, Zhubei City, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes nanostructures formed over a substrate along a first direction, and a gate structure formed over the nanostructures along a second direction. The semiconductor structure includes an S/D structure formed adjacent to the gate structure, and a plurality of inner spacer layers between the gate structure and the S/D structure. The semiconductor structure includes a hard mask layer formed on the inner spacer layers, and a top surface of the hard mask layer is higher than a top surface of the S/D structure.