The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Feb. 06, 2024
Tokyo Electron Limited, Tokyo, JP;
Atsushi Sawachi, Miyagi, JP;
Kota Ishiharada, Miyagi, JP;
Hideaki Yakushiji, Miyagi, JP;
Yoshiyasu Sato, Miyagi, JP;
Shinya Morikita, Miyagi, JP;
Shota Yoshimura, Miyagi, JP;
Toshihiro Tsuruta, Miyagi, JP;
Kazuaki Takaai, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A gas supply system includes: gas supply flow paths for independently supplying gas to a processing chamber; a flow rate controller arranged in each gas supply flow path; a primary-side valve arranged on an upstream side of the flow rate controller; a primary-side gas exhaust flow path branched between the primary-side valve and the flow rate controller; a primary-side exhaust valve arranged in the primary-side gas exhaust flow path; a secondary-side valve arranged on a downstream side of the flow rate controller; a secondary-side gas exhaust flow path branched between the secondary-side valve and the flow rate controller; and a secondary-side exhaust valve arranged in the secondary-side gas exhaust flow path. The flow rate controller includes: a control valve connected to the primary-side valve and the secondary-side valve; and a control-side orifice arranged between the control valve and the secondary-side valve.