The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2026

Filed:

Jul. 05, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

Inventors:

Yen-Chieh Huang, Hsinchu, TW;

Huai-Ying Huang, Jhonghe City, TW;

Wei-Gang Chiu, New Taipei City, TW;

Yu-Chuan Shih, Hsinchu City, TW;

Chun-Chieh Lu, Taipei City, TW;

Yu-Ming Lin, Hsinchu City, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10W 20/00 (2026.01); H10B 51/10 (2023.01); H10B 51/30 (2023.01); H10B 53/10 (2023.01); H10B 53/30 (2023.01); H10D 30/01 (2025.01); H10D 64/68 (2025.01);
U.S. Cl.
CPC ...
H10W 20/023 (2026.01); H10B 51/10 (2023.02); H10B 51/30 (2023.02); H10B 53/10 (2023.02); H10B 53/30 (2023.02); H10D 30/0415 (2025.01); H10D 64/689 (2025.01); H10W 20/096 (2026.01);
Abstract

A device structure can be formed by forming a layer stack comprising a continuous bottom electrode material layer, a continuous dielectric layer, and a continuous dielectric metal oxide layer; increasing an oxygen-to-metal ratio in a top surface portion of the continuous dielectric metal oxide layer by incorporating oxygen atoms into the top surface portion of the continuous dielectric metal oxide layer; depositing a continuous semiconductor layer over the continuous dielectric metal oxide layer; and patterning the continuous semiconductor layer and the layer stack to form a patterned layer stack including a bottom electrode, a dielectric layer, a dielectric metal oxide layer, and a semiconductor layer.


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