The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Jan. 19, 2024
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Jaroslav Stárek, Křelov-Břuchotín, CZ;
Jamie Dee Gravell, Beaverton, OR (US);
Jaroslav Maniš, Brno, CZ;
Tomáš Onderlička, Brno, CZ;
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); G01N 1/32 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01N 1/32 (2013.01); H01J 37/20 (2013.01); H01J 2237/31749 (2013.01);
Abstract
Lamellae with thin regions for TEM of regions of interest include oppositely situated S-shaped cut faces that define a waist region. In some examples, the waist has a thickness of less than 25 nm and defines a double tapered region of height of between 400 nm and 800 nm that is suitable for TEM. A portion of the lamella at the top surface can comprising a metallic or other coating than serves to support the lamella.