The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Jul. 10, 2023
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Masahiro Fukushima, Joetsu, JP;
Jun Hatakeyama, Joetsu, JP;
Tomomi Watanabe, Joetsu, JP;
Kazuhiro Katayama, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C 65/21 (2006.01); C07C 25/18 (2006.01); C07C 65/26 (2006.01); C07C 205/57 (2006.01); C07C 211/63 (2006.01); C07C 381/12 (2006.01); C07D 327/08 (2006.01); C07D 333/76 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 25/18 (2013.01); C07C 65/26 (2013.01); C07C 205/57 (2013.01); C07C 211/63 (2013.01); C07C 381/12 (2013.01); C07D 327/08 (2013.01); C07D 333/76 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); C07C 65/21 (2013.01); C07C 2601/08 (2017.05); C07C 2601/14 (2017.05); C07C 2602/42 (2017.05); C07C 2603/66 (2017.05); C07C 2603/74 (2017.05);
Abstract
Provided is a novel onium salt used for a resist composition that has high sensitivity and excellent resolution, improved LWR and CDU, and that can inhibit collapse of a resist pattern for both of positive-type and negative-type resists in lithography: an onium salt represented by the following general formula (1),